Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography.

ABSTRACT: We addressed the coating 5 mm-long cantilever microprobes with a viscoelastic material, which was intended to considerably extend the range of the traverse speed during the measurements of the 3D surface topography by damping contact-induced oscillations. The damping material was composed of epoxy glue, isopropyl alcohol, and glycerol, and its deposition onto the cantilever is described, as well as the tests of the completed cantilevers under free-oscillating conditions and in contact during scanning on a rough surface. The amplitude and phase of the cantilever's fundamental out-of-plane oscillation mode was investigated vs. the damping layer thickness, which was set via repeated coating steps. The resonance frequency and quality factor decreased with the increasing thickness of the dampin

SUBMITTER: Fahrbach M 

PROVIDER: S-EPMC9967852 | biostudies-literature | 2023 Feb

REPOSITORIES: biostudies-literature