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A Multilayered GaAs IPD Resonator with Five Airbridges for Sensor System Application.


ABSTRACT: This work proposes a microwave resonator built from gallium arsenide using integrated passive device (IPD) technology. It consists of a three-layered interlaced spiral structure with airbridges and inner interdigital structures. For integrated systems, IPD technology demonstrated outstanding performance, robustness, and a tiny size at a low cost. The airbridges were made more compact, with overall dimensions of 1590 × 800 µm2 (0.038 × 0.019 λg2). The designed microwave resonator operated at 1.99 GHz with a return loss of 39 dB, an insertion loss of 0.07 dB, and a quality factor of 1.15. Additionally, an experiment was conducted on the properties of the airbridge and how they affected resistance, inductance, and S-parameters in the construction of the resonator. To investigate the impact of airbridges on the structure, E- and H-field distributions of the resonator were simulated. Furthermore, its use in sensing applications was explored. Various concentrations of glucose solutions were used in the experiment. The proposed device featured a minimum detectable concentration of 0.2 mg/mL; high sensitivity, namely, 14.58 MHz/mg·mL-1, with a linear response; and a short response time. Thus, this work proposes a structure that exhibits potential in integrated systems and real-time sensing systems with high sensitivity.

SUBMITTER: Zhang XY 

PROVIDER: S-EPMC10972498 | biostudies-literature | 2024 Mar

REPOSITORIES: biostudies-literature

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A Multilayered GaAs IPD Resonator with Five Airbridges for Sensor System Application.

Zhang Xiao-Yu XY   Wang Zhi-Ji ZJ   Chen Jian J   Kim Eun-Seong ES   Kim Nam-Young NY   Lee Jong-Chul JC  

Micromachines 20240308 3


This work proposes a microwave resonator built from gallium arsenide using integrated passive device (IPD) technology. It consists of a three-layered interlaced spiral structure with airbridges and inner interdigital structures. For integrated systems, IPD technology demonstrated outstanding performance, robustness, and a tiny size at a low cost. The airbridges were made more compact, with overall dimensions of 1590 × 800 µm<sup>2</sup> (0.038 × 0.019 λg<sup>2</sup>). The designed microwave reso  ...[more]

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