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Ion sensing with single charge resolution using sub-10-nm electrical double layer-gated silicon nanowire transistors.


ABSTRACT: Electrical sensors have been widely explored for the analysis of chemical/biological species. Ion detection with single charge resolution is the ultimate sensitivity goal of such sensors, which is yet to be experimentally demonstrated. Here, the events of capturing and emitting a single hydrogen ion (H+) at the solid/liquid interface are directly detected using sub–10-nm electrical double layer–gated silicon nanowire field-effect transistors (SiNWFETs). The SiNWFETs are fabricated using a complementary metal-oxide-semiconductor compatible process, with a surface reassembling step to minimize the device noise. An individually activated surface Si dangling bond (DB) acts as the single H+ receptor. Discrete current signals, generated by the single H+-DB interactions via local Coulomb scattering, are directly detected by the SiNWFETs. The single H+-DB interaction kinetics is systematically investigated. Our SiNWFETs demonstrate unprecedented capability for electrical sensing applications, especially for investigating the physics of solid/liquid interfacial interactions at the single charge level.

SUBMITTER: Hu Q 

PROVIDER: S-EPMC8641926 | biostudies-literature | 2021 Dec

REPOSITORIES: biostudies-literature

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Ion sensing with single charge resolution using sub-10-nm electrical double layer-gated silicon nanowire transistors.

Hu Qitao Q   Chen Si S   Solomon Paul P   Zhang Zhen Z  

Science advances 20211203 49


Electrical sensors have been widely explored for the analysis of chemical/biological species. Ion detection with single charge resolution is the ultimate sensitivity goal of such sensors, which is yet to be experimentally demonstrated. Here, the events of capturing and emitting a single hydrogen ion (H<sup>+</sup>) at the solid/liquid interface are directly detected using sub–10-nm electrical double layer–gated silicon nanowire field-effect transistors (SiNWFETs). The SiNWFETs are fabricated usi  ...[more]

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