A Novel p-Type ZnCo_xO_y Thin Film Grown by Atomic Layer Deposition.

ABSTRACT: Reported herein is the atomic layer deposition (ALD) of novel ternary ZnCo_xO_y films possessing p-type semiconducting behavior. The preparation comprises of optimized ZnO and Co₃O₄ deposition in sub-cycles using the commercially available precursors cyclopentadienylcobalt dicarbonyl (CpCo(CO)₂), diethylzinc (DEZ) and ozone (O₃). A systematic exploration of the film's microstructure, crystallinity, optical properties and electrical properties was conducted and revealed an association with Zn/Co stoichiometry. The noteworthy results include the following: (1) by adjusting the sub-cycle of ZnO/ Co₃O₄ to 1/10, a spinel structured ZnCo_xO_y film was grown at 150 °C, with it exhibiting a sm

SUBMITTER: Li L 

PROVIDER: S-EPMC9565241 | biostudies-literature | 2022 Sep

REPOSITORIES: biostudies-literature